검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of W1.5N barrier films for Cu metallization Bystrova S, Aarnink AAI, Holleman J, Wolters RAM Journal of the Electrochemical Society, 152(7), G522, 2005 |
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of W1.5N barrier films for Cu metallization Bystrova S, Aarnink AAI, Holleman J, Wolters RAM Journal of the Electrochemical Society, 152(7), G522, 2005 |