검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Low-temperature RPCVD of Si, SiGe alloy, and Si1-yCy films on Si substrates using trisilane (Silcore (R)) Gouye A, Kermarrec O, Halimaoui A, Campidelli Y, Rouchon D, Burdin M, Holliger P, Bensahel D Journal of Crystal Growth, 311(13), 3522, 2009 |
| 2 |
Growth kinetics of Si and SiGe on Si(100), Si(110) and Si(111) surfaces Hartmann JM, Burdin M, Rolland G, Billon T Journal of Crystal Growth, 294(2), 288, 2006 |
| 3 |
Spectroscopic ellipsometry with compensator and X-ray specular reflectivity for characterization of thin optical layers on transparent substrates Bertin F, Chabli A, Chiariglione E, Burdin M, Berger M, Boudet T, Lartigue O, Ravel G Thin Solid Films, 313-314, 68, 1998 |