| 1 |
Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets
Zhu H, Hupkes J, Bunte E, Huang SM
Applied Surface Science, 259, 582, 2012 |
| 2 |
Study of ZnO:Al films for silicon thin film solar cells
Zhu H, Hupkes J, Bunte E, Huang SM
Applied Surface Science, 261, 268, 2012 |
| 3 |
Instabilities in reactive sputtering of ZnO:Al and reliable texture-etching solution for light trapping in silicon thin film solar cells
Hupkes J, Zhu H, Owen JI, Jost G, Bunte E
Thin Solid Films, 520(6), 1913, 2012 |
| 4 |
As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering
Zhang WD, Bunte E, Ruske F, Kohl D, Besmehn A, Worbs J, Siekmann H, Kirchhoff J, Gordijn A, Hupkes J
Thin Solid Films, 520(12), 4208, 2012 |
| 5 |
Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
Zhu H, Hupkes J, Bunte E, Owen J, Huang SM
Solar Energy Materials and Solar Cells, 95(3), 964, 2011 |
| 6 |
Sputtering of ZnO:Al films from dual tube targets with tilted magnetrons
Zhu H, Bunte E, Hupkes J, Huang SM
Thin Solid Films, 519(7), 2366, 2011 |
| 7 |
Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets
Zhu H, Hupkes J, Bunte E, Huang SM
Applied Surface Science, 256(14), 4601, 2010 |
| 8 |
Preparation and topography analysis of randomly textured glass substrates
Bunte E, Zhang WD, Hupkes J
Journal of Vacuum Science & Technology A, 28(5), 1255, 2010 |
| 9 |
Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells
Zhu H, Hupkes J, Bunte E, Gerber A, Huang SM
Thin Solid Films, 518(17), 4997, 2010 |
| 10 |
Aluminium doped zinc oxide sputtered from rotatable dual magnetrons for thin film silicon solar cells
Zhu H, Bunte E, Hupkes J, Siekmann H, Huang SM
Thin Solid Films, 517(10), 3161, 2009 |
