검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
AFM measurements of interactions between CMP slurry particles and substrate Burtovyy R, Liu Y, Zdyrko B, Tregub A, Moinpour M, Buehler M, Luzinov I Journal of the Electrochemical Society, 154(6), H476, 2007 |
| No. | Article |
|---|---|
| 1 |
AFM measurements of interactions between CMP slurry particles and substrate Burtovyy R, Liu Y, Zdyrko B, Tregub A, Moinpour M, Buehler M, Luzinov I Journal of the Electrochemical Society, 154(6), H476, 2007 |