검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Sidewall profile control of thick benzocyclobutene reactively ion etched in CF4/O-2 plasmas Buchwald WR, Vaccaro K Journal of Vacuum Science & Technology B, 23(1), 51, 2005 |
| 2 |
Magnetron Enhanced Reactive Ion Etching of GaAs in CH4/H2/Ar - Surface Damage Study Mclane GF, Buchwald WR, Casas L, Cole MW Journal of Vacuum Science & Technology A, 12(4), 1356, 1994 |