화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Phase transition in sputtered HfO2 thin films: A qualitative Raman study
Belo GS, Nakagomi F, Minko A, da Silva SW, Morais PC, Buchanan DA
Applied Surface Science, 261, 727, 2012
2 Low-temperature deposition of stoichiometric HfO2 on silicon: Analysis and quantification of the HfO2/Si interface from electrical and XPS measurements
Rudenja S, Minko A, Buchanan DA
Applied Surface Science, 257(1), 17, 2010
3 Low temperature chemical vapor deposition of ZrO2 on Si(100) using anhydrous zirconium(IV) nitrate
Smith RC, Hoilien N, Taylor CJ, Ma TZ, Campbell SA, Roberts JT, Copel M, Buchanan DA, Gribelyuk M, Gladfelter WL
Journal of the Electrochemical Society, 147(9), 3472, 2000