검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inherent Possibilities and Restrictions of Plasma Immersion Ion-Implantation Systems Mandl S, Brutscher J, Gunzel R, Moller W Journal of Vacuum Science & Technology B, 14(4), 2701, 1996 |
| No. | Article |
|---|---|
| 1 |
Inherent Possibilities and Restrictions of Plasma Immersion Ion-Implantation Systems Mandl S, Brutscher J, Gunzel R, Moller W Journal of Vacuum Science & Technology B, 14(4), 2701, 1996 |