검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Measuring acid generation efficiency in chemically amplified resists with all three beams Szmanda CR, Brainard RL, Mackevich JF, Awaji A, Tanaka T, Yamada Y, Bohland J, Tedesco S, Dal'Zotto B, Bruenger W, Torkler M, Fallmann W, Loeschner H, Kaesmaier R, Nealey PM, Pawloski AR Journal of Vacuum Science & Technology B, 17(6), 3356, 1999 |
| 2 |
Plasma source for ion and electron beam lithography Lee Y, Gough RA, Leung KN, Vujic J, Williams MD, Zahir N, Fallman W, Tockler M, Bruenger W Journal of Vacuum Science & Technology B, 16(6), 3367, 1998 |
| 3 |
Application of Optical Lithography for High-Aspect-Ratio Microstructures Loechel B, Demmeler R, Rothe M, Bruenger W, Fehlberg S, Gruetzner G Journal of Vacuum Science & Technology B, 14(6), 4179, 1996 |