검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultralow k films by using a plasma-enhanced chemical vapor deposition porogen approach: Study of the precursor reaction mechanisms Castex A, Jousseaume V, Deval J, Bruat J, Favennec L, Passemard G Journal of Vacuum Science & Technology A, 26(5), 1343, 2008 |