검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Anisotropic plasma etching of polymers using a cryo-cooled resist mask Schuppert B, Brose E, Petermann K, Moosburger R Journal of Vacuum Science & Technology A, 18(2), 385, 2000 |
| No. | Article |
|---|---|
| 1 |
Anisotropic plasma etching of polymers using a cryo-cooled resist mask Schuppert B, Brose E, Petermann K, Moosburger R Journal of Vacuum Science & Technology A, 18(2), 385, 2000 |