검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electron-Beam-Induced Damage of Silicon-Germanium Paul DJ, Ryan JM, Pepper M, Broers AN, Whall TE, Fernandez JM, Joyce BA Journal of Vacuum Science & Technology B, 14(6), 3834, 1996 |
| 2 |
A Study of the Effect of Ultrasonic Agitation During Development of Poly(Methylmethacrylate) for Ultrahigh-Resolution Electron-Beam Lithography Ryan JM, Hoole AC, Broers AN Journal of Vacuum Science & Technology B, 13(6), 3035, 1995 |
| 3 |
Realization of Limited-Area Cathodes and Their Performance in an Electron-Optical Column Maloney CE, Nakamura H, Broers AN, Xia S, Peters L Journal of Vacuum Science & Technology B, 12(1), 26, 1994 |
| 4 |
Tolerance on Alignment Error in Ghost Proximity Effect Correction Moritzumi K, Broers AN Journal of Vacuum Science & Technology B, 11(6), 2114, 1993 |
| 5 |
Directly Patterned Low-Voltage Planar Tungsten Lateral Field-Emission Structures Hoole AC, Moore DF, Broers AN Journal of Vacuum Science & Technology B, 11(6), 2574, 1993 |