검색결과 : 1건
No. | Article |
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1 |
Improved Sensitivity and Depth Resolution for Analyses of Shallow P-N-Junctions in Silicon with Secondary-Ion Mass-Spectrometry Erickson JW, Brigham R Journal of Vacuum Science & Technology B, 14(1), 353, 1996 |
No. | Article |
---|---|
1 |
Improved Sensitivity and Depth Resolution for Analyses of Shallow P-N-Junctions in Silicon with Secondary-Ion Mass-Spectrometry Erickson JW, Brigham R Journal of Vacuum Science & Technology B, 14(1), 353, 1996 |