검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Spatially resolved fluorine actinometry Shannon S, Holloway JP, Brake ML Journal of Vacuum Science & Technology A, 17(5), 2703, 1999 |
| 2 |
In-Situ Diagnostic for Etch Uniformity Buie MJ, Pender JT, Soniker J, Brake ML, Elta M Journal of Vacuum Science & Technology A, 13(4), 1930, 1995 |