검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
On the target surface cleanness during magnetron sputtering Schelfhout R, Strijckmans K, Boydens F, Depla D Applied Surface Science, 355, 743, 2015 |
| 2 |
The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering Boydens F, Leroy WP, Persoons R, Depla D Thin Solid Films, 531, 32, 2013 |