검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Complete solvent free stripping of via structures using NF3/H2O/O-2 ashing chemistry Au WK, Solis R, Bersin R, Xu H, Boumerzoug M Journal of Vacuum Science & Technology A, 17(4), 1364, 1999 |
| 2 |
Optical-Emission Spectroscopy as a Real-Time Diagnostic-Tool for Plasma-Assisted Deposition of Tin Boumerzoug M, Boudreau M, Mascher P Plasma Chemistry and Plasma Processing, 17(2), 181, 1997 |
| 3 |
The Effect of the Native-Oxide on Musk Undercutting of V-Grooves Etched into (100) InP Surfaces Using an Sinx Mask Wang J, Thompson DA, Simmons JG, Boumerzoug M, Boudreau M, Mascher P Journal of the Electrochemical Society, 142(2), 593, 1995 |
| 4 |
Low-Temperature Radio-Frequency Sputter-Deposition of Tin Thin-Films Using Optical-Emission Spectroscopy as Process Monitor Pang Z, Boumerzoug M, Kruzelecky RV, Mascher P, Simmons JG, Thompson DA Journal of Vacuum Science & Technology A, 12(1), 83, 1994 |