검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Synthesis of strained SiGe on Si(100) by pulsed laser induced epitaxy Kociniewski T, Fossard F, Boulmer J, Bouchier D Thin Solid Films, 518(9), 2542, 2010 |
| 2 |
Highly doped Si and Ge formed by GILD (gas immersion laser doping); from GILD to superconducting silicon Cammilleri D, Fossard F, Debarre D, Manh CT, Dubois C, Bustarret E, Marcenat C, Achatz P, Bouchier D, Boulmer J Thin Solid Films, 517(1), 75, 2008 |
| 3 |
Localized laser thermal annealing of nanometric SiGe layers protected by a dielectric Bragg mirror Cammilleri D, Fossard F, Halbwax M, Manh CT, Yam N, Debarre D, Boulmer J, Bouchier D Thin Solid Films, 517(1), 327, 2008 |
| 4 |
Laser doping for microelectronics and microtechnology Sarnet T, Kerrien G, Yaakoubi N, Bosseboeuf A, Dufour-Gergam E, Debarre D, Boulmer J, Kakushima K, Laviron C, Hernandez M, Venturini J, Bourouina T Applied Surface Science, 247(1-4), 537, 2005 |
| 5 |
Gas immersion laser doping (GILD) for ultra-shallow junction formation Kerrien G, Sarnet T, Debarre D, Boulmer J, Hernandez M, Laviron C, Semeria MN Thin Solid Films, 453-54, 106, 2004 |
| 6 |
Excimer laser thermal processing of ultra-shallow junction: laser pulse duration Venturini J, Hernandez M, Kerrien G, Laviron C, Camel D, Santailler JL, Sarnet I, Boulmer J Thin Solid Films, 453-54, 145, 2004 |
| 7 |
Optical characterization of laser processed ultra-shallow junctions Kerrien G, Hernandez M, Laviron C, Sarnet T, Debarre D, Noguchi T, Zahorski D, Venturini J, Semeria MN, Boulmer J Applied Surface Science, 208, 277, 2003 |
| 8 |
Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments Hernandez M, Venturini J, Zahorski D, Boulmer J, Debarre D, Kerrien G, Sarnet T, Laviron C, Semeria MN, Camel D, Santailler JL Applied Surface Science, 208, 345, 2003 |
| 9 |
Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping Kerrien G, Boulmer J, Debarre D, Bouchier D, Grouillet A, Lenoble D Applied Surface Science, 186(1-4), 45, 2002 |
| 10 |
Local Strains in Si1-X-Ygexcy Alloys as Deduced from Vibrational Frequencies Finkman E, Rucker H, Meyer F, Prawer SD, Bouchier D, Boulmer J, Bodnar S, Regolini JL Thin Solid Films, 294(1-2), 118, 1997 |