검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Atomic Layer Deposition Al2O3 Coatings Significantly Improve Thermal, Chemical, and Mechanical Stability of Anodic TiO2 Nanotube Layers Zazpe R, Prikryl J, Gartnerova V, Nechvilova K, Benes L, Strizik L, Jager A, Bosund M, Sopha H, Macak JM Langmuir, 33(13), 3208, 2017 |
| 2 |
Properties of atomic-layer-deposited ultra-thin AIN films on GaAs surfaces Mattila P, Bosund M, Jussila H, Aierken A, Riikonen J, Huhtio T, Lipsanen H, Sopanen M Applied Surface Science, 314, 570, 2014 |
| 3 |
Effect of growth temperature on the epitaxial growth of ZnO on GaN by ALD Sarkijarvi S, Sintonen S, Tuomisto F, Bosund M, Suihkonen S, Lipsanen H Journal of Crystal Growth, 398, 18, 2014 |
| 4 |
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors Putkonen M, Bosund M, Ylivaara OME, Puurunen RL, Kilpi L, Ronkainen H, Sintonen S, Ali S, Lipsanen H, Liu XW, Haimi E, Hannula SP, Sajavaara T, Buchanan I, Karwacki E, Vaha-Nissi M Thin Solid Films, 558, 93, 2014 |
| 5 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride (vol 256, pg 7434, 2010) Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(6), 2412, 2011 |
| 6 |
Properties of AlN grown by plasma enhanced atomic layer deposition Bosund M, Sajavaara T, Laitinen M, Huhtio T, Putkonen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(17), 7827, 2011 |
| 7 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 256(24), 7434, 2010 |
| 8 |
Atomic layer deposition of ytterbium oxide using beta-diketonate and ozone precursors Bosund M, Mizohata K, Hakkarainen T, Putkonen M, Soderlund M, Honkanen S, Lipsanen H Applied Surface Science, 256(3), 847, 2009 |
| 9 |
Atomic layer deposited TiO2 films in photodegradation of aqueous salicylic acid Vilhunen S, Bosund M, Kaariainen ML, Cameron D, Sillanpaa M Separation and Purification Technology, 66(1), 130, 2009 |
| 10 |
Passivation of GaAs surface by atomic-layer-deposited titanium nitride Bosund M, Aierken A, Tiilikainen J, Hakkarainen T, Lipsanen H Applied Surface Science, 254(17), 5385, 2008 |