검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma Biasotto C, Daltrini AM, Teixeira RC, Boscoli FA, Diniz JA, Moshkalev SA, Doi I Journal of Vacuum Science & Technology B, 25(4), 1166, 2007 |