검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Design and performance of an electrothermal MEMS microengine capable of bi-directional motion Kolesar ES, Odom WE, Jayachandran JA, Ruff MD, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Bosch JE, Wilks RJ, McAllister JB Thin Solid Films, 447, 481, 2004 |
| 2 |
Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine Kolesar ES, Ruff MD, Odom WE, Jayachadran JA, McAllister JB, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Bosch JE, Wilks RJ Thin Solid Films, 420-421, 530, 2002 |
| 3 |
Three-dimensional structures assembled from polysilicon surface micromachined components containing continuous hinges and microrivets Kolesar ES, Ruff MD, Odom WE, Howard JT, Ko SY, ALlen PB, Wilken JM, Wilks RJ, Bosch JE, Boydston NC Thin Solid Films, 398-399, 566, 2001 |