검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of interfaces density and thermal processes on mechanical stress of PECVD silicon nitride Picciotto A, Bagolini A, Bellutti P, Boscardin M Applied Surface Science, 256(1), 251, 2009 |
| No. | Article |
|---|---|
| 1 |
Influence of interfaces density and thermal processes on mechanical stress of PECVD silicon nitride Picciotto A, Bagolini A, Bellutti P, Boscardin M Applied Surface Science, 256(1), 251, 2009 |