검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition Fullager DB, Boreman GD, Ellinger CD, Hofmann T Thin Solid Films, 653, 267, 2018 |
| 2 |
Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate Tharp JS, Shelton DJ, Wadsworth SL, Boreman GD Journal of Vacuum Science & Technology B, 26(5), 1821, 2008 |
| 3 |
Fabrication of periodic microstructures on flexible polyimide membranes Shelton DJ, Tharp JS, Zummo G, Folks WR, Boreman GD Journal of Vacuum Science & Technology B, 25(6), 1827, 2007 |
| 4 |
Technique for thermal isolation of antenna-coupled infrared microbolometers Middleton CF, Boreman GD Journal of Vacuum Science & Technology B, 24(5), 2356, 2006 |
| 5 |
Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lens Middlebrook CT, Zummo G, Boreman GD Journal of Vacuum Science & Technology B, 24(6), 2566, 2006 |
| 6 |
Vertical-via interconnection for infrared antennas Mandviwala TA, Lail BA, Boreman GD Journal of Vacuum Science & Technology B, 24(6), 2612, 2006 |
| 7 |
Wavelength tuning of an antenna-coupled infrared microbolometer Gritz MA, Metzler M, Malocha D, Abdel-Rahman M, Monacelli B, Zummo G, Boreman GD Journal of Vacuum Science & Technology B, 22(6), 3133, 2004 |
| 8 |
Fabrication of air bridges using electron beam lithography Gritz MA, Metzler M, Moser J, Spencer D, Boreman GD Journal of Vacuum Science & Technology B, 21(1), 332, 2003 |
| 9 |
Fabrication of an infrared antenna-coupled microbolometer linear array using chrome as a mask Gritz MA, Puscasu I, Spencer D, Boreman GD Journal of Vacuum Science & Technology B, 21(6), 2608, 2003 |