화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Use of spectroscopic ellipsometry for feedback control during the growth of thin AlAs layers
Beaudoin M, Johnson SR, Boonzaayer MD, Zhang YH, Johs B
Journal of Vacuum Science & Technology B, 17(3), 1233, 1999
2 Closed-loop control of composition and temperature during the growth of InGaAs lattice matched to InP
Johnson SR, Grassi E, Beaudoin M, Boonzaayer MD, Tsakalis KS, Zhang YH
Journal of Vacuum Science & Technology B, 17(3), 1237, 1999