검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Time-resolved cavity ring-down spectroscopic study of the gas phase and surface loss rates of Si and SiH3 plasma radicals Hoefnagels JPM, Stevens AAE, Boogaarts MGH, Kessels WMM, van de Sanden MCM Chemical Physics Letters, 360(1-2), 189, 2002 |
| 2 |
Cavity ring down detection of SiH3 in a remote SiH4 plasma and comparison with model calculations and mass spectrometry Kessels WMM, Leroux A, Boogaarts MGH, Hoefnagels JPM, van de Sanden MCM, Schram DC Journal of Vacuum Science & Technology A, 19(2), 467, 2001 |
| 3 |
Improvement of hydrogenated amorphous silicon properties with increasing contribution of SiH3 to film growth Kessels WMM, Boogaarts MGH, Hoefnagels JPM, Schram DC, van de Sanden MCM Journal of Vacuum Science & Technology A, 19(3), 1027, 2001 |
| 4 |
Cavity ring down detection of SiH3 on the broadband (A)over-tilde (2)A'(1) <- (X)over-tilde (2)A(1) transition in a remote Ar-H-2-SiH4 plasma Boogaarts MGH, Bocker PJ, Kessels WMM, Schram DC, van de Sanden MCM Chemical Physics Letters, 326(5-6), 400, 2000 |