화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Adsorption and Decomposition of Diethylsilane and Diethylgermane on Si(100) - Surface-Reactions for an Atomic Layer Epitaxial Approach to Column-IV Epitaxy
Kellerman BK, Mahajan A, Russell NM, Ekerdt JG, Banerjee SK, Tasch AF, Campion A, White JM, Bonser DJ
Journal of Vacuum Science & Technology A, 13(4), 1819, 1995
2 Surface-Chemistry of Diethylsilane and Diethylgermane on Si(100) - An Atomic Layer Epitaxy Approach
Mahajan A, Kellerman BK, Russell NM, Banerjee S, Campion A, Ekerdt JG, Tasch A, White JM, Bonser DJ
Journal of Vacuum Science & Technology A, 12(4), 2265, 1994