검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials - some comments Karunaratne MSA, Bonar JM, Ashburn P, Willoughby AFW Journal of Materials Science, 41(3), 1013, 2006 |