검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography Keil M, Beck M, Frennesson G, Theander E, Bolmsjo E, Montelius L, Heidari B Journal of Vacuum Science & Technology B, 22(6), 3283, 2004 |