검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Measuring acid generation efficiency in chemically amplified resists with all three beams Szmanda CR, Brainard RL, Mackevich JF, Awaji A, Tanaka T, Yamada Y, Bohland J, Tedesco S, Dal'Zotto B, Bruenger W, Torkler M, Fallmann W, Loeschner H, Kaesmaier R, Nealey PM, Pawloski AR Journal of Vacuum Science & Technology B, 17(6), 3356, 1999 |
| 2 |
Top surface imaging process and materials development for 193 nm and extreme ultraviolet lithography Rao V, Hutchinson J, Holl S, Langston J, Henderson C, Wheeler DR, Cardinale G, O'Connell D, Goldsmith J, Bohland J, Taylor G, Sinta R Journal of Vacuum Science & Technology B, 16(6), 3722, 1998 |