검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nanometer Table-Top Proximity X-Ray-Lithography with Liquid-Target Laser-Plasma Source Malmqvist L, Bogdanov AL, Montelius L, Hertz HM Journal of Vacuum Science & Technology B, 15(4), 814, 1997 |
| 2 |
Influence of electron-beam induced microporosity on masking properties of polymethylmethacrylate in wet etching of nanometer structures Maximov I, Bogdanov AL, Montelius L Journal of Vacuum Science & Technology B, 15(6), 2921, 1997 |
| 3 |
Fabrication of Arrays of Nanometer-Size Test Structures for Scanning Probe Microscope Tips Characterization Bogdanov AL, Erts D, Nilsson B, Olin H Journal of Vacuum Science & Technology B, 12(6), 3681, 1994 |
| 4 |
2 Methods of Experimental Evaluation of Long-Range Proximity Function Components in Electron-Beam Lithography Bogdanov AL, Polyakov A Journal of Vacuum Science & Technology B, 11(6), 2758, 1993 |