검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Thermal stability of thin InGaN films on GaN Thaler GT, Koleske DD, Lee SR, Bogart KHA, Crawford MH Journal of Crystal Growth, 312(11), 1817, 2010 |
| 2 |
Dislocation reduction in AlGaN grown on patterned GaN Follstaedt DM, Allerman AA, Lee SR, Michael JR, Bogart KHA, Crawford MH, Missert NA Journal of Crystal Growth, 310(4), 766, 2008 |
| 3 |
Investigation of surface treatment schemes on n-type GaN and Al0.20Ga0.80N Selvanathan D, Mohammed FM, Bae JO, Adesida I, Bogart KHA Journal of Vacuum Science & Technology B, 23(6), 2538, 2005 |
| 4 |
Growth and design of deep-UV (240-290 nm) light emitting diodes using AlGaN alloys Allerman AA, Crawford MH, Fischer AJ, Bogart KHA, Lee SR, Follstaedt DM, Provencio PP, Koleske DD Journal of Crystal Growth, 272(1-4), 227, 2004 |
| 5 |
Feature evolution during plasma etching. II. Polycrystalline silicon etching Lane JM, Klemens FP, Bogart KHA, Malyshev MV, Lee JTC Journal of Vacuum Science & Technology A, 18(1), 188, 2000 |
| 6 |
Mask charging and profile evolution during chlorine plasma etching of silicon Bogart KHA, Klemens FP, Malyshev MV, Colonell JI, Donnelly VM, Lee JTC, Lane JM Journal of Vacuum Science & Technology A, 18(1), 197, 2000 |
| 7 |
The role of feedgas chemistry, mask material, and processing parameters in profile evolution during plasma etching of Si(100) Lane JM, Bogart KHA, Klemens FP, Lee JTC Journal of Vacuum Science & Technology A, 18(5), 2067, 2000 |
| 8 |
Reduction of plasma induced damage in an inductively coupled plasma using pulsed source power Samukawa S, Noguchi K, Colonell JI, Bogart KHA, Malyshev MV, Donnelly VM Journal of Vacuum Science & Technology B, 18(2), 834, 2000 |
| 9 |
Deposition of SiO2 films from novel alkoxysilane/O-2 plasmas Bogart KHA, Ramirez SK, Gonzales LA, Bogart GR, Fisher ER Journal of Vacuum Science & Technology A, 16(6), 3175, 1998 |