검색결과 : 2건
No. | Article |
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1 |
Step Coverage Comparison of Ti/Tin Deposited by Collimated and Uncollimated Physical Vapor-Deposition Techniques Wang SQ, Schlueter J, Gondran C, Boden T Journal of Vacuum Science & Technology B, 14(3), 1846, 1996 |
2 |
Silicon-on-Insulator Material Qualification for Low-Power Complementary Metal-Oxide-Semiconductor Application Mendicino MA, Vasudev PK, Maillot P, Hoener C, Baylis J, Bennett J, Boden T, Jackett S, Huffman K, Godwin M Thin Solid Films, 270(1-2), 578, 1995 |