검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
SiO2 thickness determination by x-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry Cole DA, Shallenberger JR, Novak SW, Moore RL, Edgell MJ, Smith SP, Hitzman CJ, Kirchhoff JF, Principe E, Nieveen W, Huang FK, Biswas S, Bleiler RJ, Jones K Journal of Vacuum Science & Technology B, 18(1), 440, 2000 |
| 2 |
Long-Term Reproducibility of Secondary-Ion Mass-Spectroscopy Measurements in Silicon Chu PK, Smith SP, Bleiler RJ Journal of Vacuum Science & Technology B, 14(5), 3321, 1996 |
| 3 |
Determination of Sub-Parts per Billion Boron Contamination in N+ Czochralski Silicon Substrates by SIMS Chu PK, Bleiler RJ, Metz JM Journal of the Electrochemical Society, 141(12), 3453, 1994 |