검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hard a-SiC:H films formed by remote hydrogen microwave plasma chemical vapor deposition using a novel single-source precursor Wrobel AM, Walkiewicz-Pietrzykowska A, Uznanski P, Glebocki B Thin Solid Films, 520(24), 7100, 2012 |