검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices Birkholz M, Ehwald KE, Kulse P, Drews J, Frohlich M, Haak U, Kaynak M, Matthus E, Schulz K, Wolansky D Advanced Functional Materials, 21(9), 1652, 2011 |
| 2 |
Highly < 100 >-oriented growth of polycrystalline silicon films on glass by pulsed magnetron sputtering Reinig P, Selle B, Fenske F, Fuhs W, Alex V, Birkholz M Journal of Vacuum Science & Technology A, 20(6), 2004, 2002 |
| 3 |
Electron-paramagnetic resonance (EPR) and light-induced EPR investigations of CuGaSe2 Birkholz M, Kanschat P, Weiss T, Lips K Thin Solid Films, 361-362, 243, 2000 |