검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers Claflin B, Binger M, Lucovsky G Journal of Vacuum Science & Technology A, 16(3), 1757, 1998 |
| No. | Article |
|---|---|
| 1 |
Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers Claflin B, Binger M, Lucovsky G Journal of Vacuum Science & Technology A, 16(3), 1757, 1998 |