검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Amorphous fluorocarbon polymer (a-C : F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C8F18) vapor I: Deposition, morphology, structural and chemical properties Biloiu C, Biloiu IA, Sakai Y, Suda Y, Ohta A Journal of Vacuum Science & Technology A, 22(1), 13, 2004 |
| 2 |
Amorphous fluorocarbon polymer (a-C : F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C8F18) vapor. II. Dielectric and insulating properties Biloiu C, Biloiu IA, Sakai Y, Sugawara H, Ohta A Journal of Vacuum Science & Technology A, 22(4), 1158, 2004 |
| 3 |
Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors Biloiu C, Ehrich H, Musa G Journal of Vacuum Science & Technology A, 19(3), 757, 2001 |