검색결과 : 1건
No. | Article |
---|---|
1 |
Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizations Bigl S, Wurster S, Cordill MJ, Kiener D Thin Solid Films, 612, 153, 2016 |
No. | Article |
---|---|
1 |
Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizations Bigl S, Wurster S, Cordill MJ, Kiener D Thin Solid Films, 612, 153, 2016 |