검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Preliminary-Results from a Prototype Projection Electron-Beam Stepper-Scattering with Angular Limitation Projection Electron-Beam Lithography Proof-of-Concept System Harriott LR, Berger SD, Biddick C, Blakey MI, Bowler SW, Brady K, Camarda RM, Connelly WF, Crorken A, Custy J, Dimarco R, Farrow RC, Felker JA, Fetter L, Freeman R, Hopkins L, Huggins HA, Knurek CS, Kraus JS, Liddle JA, Mkrtychan M, Novembre AE, Peabody ML, Tarascon RG, Wade HH, Waskiewicz WK, Watson GP, Werder KS, Windt D Journal of Vacuum Science & Technology B, 14(6), 3825, 1996 |
| 2 |
Measurement of the Backscatter Coefficient Using Resist Response Curves for 20-100 keV Electron-Beam Lithography on Si Watson GP, Fu D, Berger SD, Tennant D, Fetter L, Novembre A, Biddick C Journal of Vacuum Science & Technology B, 14(6), 4277, 1996 |
| 3 |
Microfabrication by Ion Milling - The Lathe Technique Vasile MJ, Biddick C, Schwalm SA Journal of Vacuum Science & Technology B, 12(4), 2388, 1994 |