검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films Bhattacharyya AS, Mishra SK, Mukherjee S Journal of Vacuum Science & Technology A, 28(4), 505, 2010 |
| No. | Article |
|---|---|
| 1 |
Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films Bhattacharyya AS, Mishra SK, Mukherjee S Journal of Vacuum Science & Technology A, 28(4), 505, 2010 |