화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Ultrathin CVD Cu seed layer formation using copper oxynitride deposition and room temperature remote hydrogen plasma reduction
Kim H, Bhandari HB, Xu S, Gordon RG
Journal of the Electrochemical Society, 155(7), H496, 2008
2 In situ attenuated total reflectance Fourier transform infrared spectroscopy of hafnium(IV) tert butoxide adsorption onto hydrogen terminated Si(100) and Si(111)
Li K, Dubey S, Bhandari HB, Hu Z, Turner CH, Klein TM
Journal of Vacuum Science & Technology A, 25(5), 1389, 2007