검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Assessment of polishing-related surface damage in silicon carbide Sanchez EK, Ha S, Grim J, Skowronski M, Vetter WM, Dudley M, Bertke R, Mitchel WC Journal of the Electrochemical Society, 149(2), G131, 2002 |
| 2 |
Comparison of mechanical and chemomechanical polished SiC wafers using photon backscattering Mitchel WC, Brown J, Buckanan D, Bertke R, Malalingham K, Orazio FD, Pirouz P, Tseng HJR, Ramabadran UB, Roughani B Materials Science Forum, 338-3, 841, 2000 |