검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Highly uniform epitaxial SiC-layers grown in a hot-wall CVD reactor with mechanical rotation Schoner A, Konstantinov A, Karlsson S, Berge R Materials Science Forum, 389-3, 187, 2002 |
| No. | Article |
|---|---|
| 1 |
Highly uniform epitaxial SiC-layers grown in a hot-wall CVD reactor with mechanical rotation Schoner A, Konstantinov A, Karlsson S, Berge R Materials Science Forum, 389-3, 187, 2002 |