검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110) Tiggelaar RM, Berenschot JW, Elwenspoek MC, Gardeniers JGE, Dorsman R, Kleijn CR Journal of Vacuum Science & Technology B, 25(4), 1207, 2007 |
| 2 |
Precise test of the diffusion-controlled wet isotropic etching of silicon via circular mask openings Svetovoy VB, Berenschot JW, Elwenspoek MC Journal of the Electrochemical Society, 153(9), C641, 2006 |
| 3 |
Use of selective anodic bonding to create micropump chambers with virtually no dead volume Veenstra TT, Berenschot JW, Gardeniers JGE, Sanders RGP, Elwenspoek MC, van den Berg A Journal of the Electrochemical Society, 148(2), G68, 2001 |
| 4 |
Selective wafer bonding by surface roughness control Gui C, Oosterbroek RE, Berenschot JW, Schlautmann S, Lammerink TSJ, van den Berg A, Elwenspoek MC Journal of the Electrochemical Society, 148(4), G225, 2001 |