검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications Berdova M, Wiemer C, Lamperti A, Tallarida G, Cianci E, Lamagna L, Losa S, Rossini S, Somaschini R, Gioveni S, Fanciulli M, Franssila S Applied Surface Science, 368, 470, 2016 |
| 2 |
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion Ylivaara OME, Liu XW, Kilpi L, Lyytinen J, Schneider D, Laitinen M, Julin J, Ali S, Sintonen S, Berdova M, Haimi E, Sajavaara T, Ronkainen H, Lipsanen H, Koskinen J, Hannula SP, Puurunen RL Thin Solid Films, 552, 124, 2014 |