검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor Benissad N, Aumaille K, Granier A, Goullet A Thin Solid Films, 384(2), 230, 2001 |
| No. | Article |
|---|---|
| 1 |
Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor Benissad N, Aumaille K, Granier A, Goullet A Thin Solid Films, 384(2), 230, 2001 |