검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improvement of Ta-based thin film barriers on copper by ion implantation of nitrogen and oxygen Wieser E, Peikert M, Wenzel C, Schreiber J, Bartha JW, Bendjus B, Melov VV, Reuther H, Mucklich A, Adolphi B, Fischer D Thin Solid Films, 410(1-2), 121, 2002 |