검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of multi-hit capability on quantitative measurement of NiPtSi thin film with laser-assisted atom probe tomography Kinno T, Akutsu H, Tomita M, Kawanaka S, Sonehara T, Hokazono A, Renaud L, Martin I, Benbalagh R, Salle B, Takeno S Applied Surface Science, 259, 726, 2012 |
| 2 |
Shallow As dose measurements of patterned wafers with secondary ion mass spectrometry and low energy electron induced x-ray emission spectroscopy Ehrke HU, Loibl N, Moret MP, Horreard F, Choi J, Hombourger C, Paret V, Benbalagh R, Morel N, Schuhmacher M Journal of Vacuum Science & Technology B, 28(1), C1C54, 2010 |
| 3 |
Round-robin study of arsenic implant dose measurement in silicon by SIMS Simons D, Kim K, Benbalagh R, Bennett J, Chew A, Gehre D, Hasegawa T, Hitzman C, Ko J, Lindstrom R, MacDonald B, Magee C, Montgomery N, Peres P, Ronsheim P, Yoshikawa S, Schuhmacher M, Stockwell W, Sykes D, Tomita A, Toujou F, Won J Applied Surface Science, 252(19), 7232, 2006 |