검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions Bellingham J, Dowsett MG Applied Surface Science, 203, 130, 2003 |
| 2 |
Quantitative analysis of the top 5 nm of boron ultra-shallow implants Bellingham J, Dowsett MG, Collart E, Kirkwood D Applied Surface Science, 203, 851, 2003 |