검색결과 : 1건
No. | Article |
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1 |
Study of the ignition behavior of a pulsed dc discharge used for plasma-assisted chemical-vapor deposition Beer TA, Laimer J, Stori H Journal of Vacuum Science & Technology A, 18(2), 423, 2000 |
No. | Article |
---|---|
1 |
Study of the ignition behavior of a pulsed dc discharge used for plasma-assisted chemical-vapor deposition Beer TA, Laimer J, Stori H Journal of Vacuum Science & Technology A, 18(2), 423, 2000 |