화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Analysis of USJ formation with combined RTA/laser annealing conditions for 28 nm high-k/metal gate CMOS technology using advanced TCAD for process and device simulation
Bazizi EM, Zaka A, Benistant F
Solid-State Electronics, 83, 61, 2013
2 Transfer of physically-based models from process to device simulations: Application to advanced SOI MOSFETs
Bazizi EM, Pakfar A, Fazzini PF, Cristiano F, Tavernier C, Claverie A, Zographos N, Zechner C, Scheid E
Thin Solid Films, 518(9), 2427, 2010