화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Optical characterization of wide bandgap semiconductors
Edwards NV, Bremser MD, Batchelor AD, Buyanova IA, Madsen LD, Yoo SD, Welhkamp T, Wilmers K, Cobet C, Esser N, Davis RF, Aspnes DE, Monemar B
Thin Solid Films, 364(1-2), 98, 2000
2 Quality of selective silicon epitaxial films deposited using disilane and chlorine
O'Neil PA, Ozturk MC, Batchelor AD, Xu MM, Maher DM
Journal of the Electrochemical Society, 146(6), 2337, 1999
3 Effects of oxygen during selective silicon epitaxial growth using disilane and chlorine
O'Neil PA, Ozturk MC, Batchelor AD, Xu MM, Maher DM
Journal of the Electrochemical Society, 146(6), 2344, 1999
4 Growth of selective silicon epitaxy using disilane and chlorine on heavily implanted substrates - I. Role of implanted BF2
O'Neil PA, Ozturk MC, Batchelor AD, Venables D, Xu MM, Maher DM
Journal of the Electrochemical Society, 146(8), 3070, 1999
5 Growth of selective silicon epitaxy using disilane and chlorine on heavily implanted substrates - II. Role of implanted arsenic
O'Neil PA, Ozturk MC, Batchelor AD, Venables D, Maher DM
Journal of the Electrochemical Society, 146(8), 3079, 1999